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Femtosecond Laser Structuring of β-BaB2O4

Aim: Micromachining of ridge-type waveguides on top of borate crystals for integrated optics devices operating in the UV range. Approach: Focused femtsecond laser beam is used for the surface ablation of samples mounted on a 3D translation stage with a sub-micron positioning resolution. Additionally, ion sputtering is applied to smoothen the ablated surface Impact: Alternative method to the micro-lithographic structering, especially suitable for hygroscopic materials. such as β-BaB2O4 and other borate crystals.

Femtosecond Laser Structuring
Scanning electron microscope picture of a BBO ridge waveguide micromachined by a femtosecond laser (left). Using ion sputtering, the side wall roughness of the ridges was reduced from 60 nm to 30 nm rms (right).

R. Degl'Innocenti, S. Reidt, A. Guarino, D. Rezzonico, G. Poberaj, P. GŁnter, "Micromachining of ridge optical waveguides on top of He+-implanted β-BaB2O4 crystals by femtosecond laser ablation", J.of Appl. Phys. 100, 113121 (2006)

People involved: Degl'Innocenti, Reidt, Guarino, Poberaj

last change: 2007/01/08 by webmaster
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